Ti1-xAlxN, Ti1-xZrxN and Ti1-xCrxN films synthesized by the AIP method

Ti1-xAlxN, Ti1-xZrxN and Ti1-xCrxN films were synthesized by changing the contents, x values, using the are ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti1-xAlxN films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti1-xCrxN and Ti1-xZrxN kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti1-xAlxN and Ti1-xCrxN monotonously decreased from 4.23 Angstrom (x = 0) down to 4.17 Angstrom (x = 0.6) and to 4.16 Angstrom (x = 1.0), respectively. On the other hand, the lattice parameters of Ti1-xZrxN films monotonously increased from 4.23 Angstrom (x = 0) up to 4.58 Angstrom (x = 1.0). The maximum micro-hardness of Ti1-xAlxN, Ti1-xZrxN and Ti(1-x)Ci(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.