Laser cleaning of field emitter arrays for enhanced electron emission

被引：21

作者：

Yavas, O

Suzuki, N

Takai, M

Hosono, A

Kawabuchi, S

机构：

[1] Osaka Univ, Res Ctr Mat Sci Extreme Condit, Toyonaka, Osaka 5608531, Japan

[2] Mitsubishi Elect Co, Adv Technol R&D Ctr, Amagasaki, Hyogo 661, Japan

来源：

APPLIED PHYSICS LETTERS | 1998年 / 72卷 / 22期

关键词：

D O I：

10.1063/1.121461

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of laser irradiation on the electron emission efficiency of field emitter arrays has been investigated as a function of wavelength using different harmonics of a diode-pumped Nd:YLF laser. While irradiation in the infrared or visible range did not induce any observable change in the emission behavior, ultraviolet laser irradiation, even at a lower fluence compared to infrared or visible, resulted in a significant increase of the emission efficiency, revealing that the photodecomposition of organic contaminants is the main mechanism for cleaning. During laser irradiation, the emission current increases gradually, approaching a saturation level as the surface is cleaned. (C) 1998 American Institute of Physics.

引用

页码：2797 / 2799

页数：3

共 12 条

[1] OPTICAL REFLECTIVITY OF SI ABOVE THE MELTING-POINT [J].