Aerosol plasma deposition method for preparation of lead zirconate titanate thick films

被引：2

作者：

Peng, CJ

Wang, SC

Wang, SF

Chang, CS

Lin, TS

机构：

[1] Ind Technol Res Inst, Mat Res Labs, Hsinchu 310, Taiwan

[2] Natl taipei Univ Technol, Dept Mat & Minerals Engn, Taipei 106, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 5A期

关键词：

ferroelectrics; PZT; deposition; microwave plasma; film; aerosol;

D O I：

10.1143/JJAP.44.3240

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead zirconate titanate (PZT) thick films were grown by a novel aerosol plasma deposition (APD) method, which combines aerosol deposition (AD) and low-temperature microwave plasma. In our set-up, the deposition rate used in the APD method was about one order of magnitude higher than that in the AD method, which can be attributed to the charging and decomposition effects of the plasma on moving agglomerates to form a trapped jet. While an as-grown APD film deposited at 200 degrees C with a thickness of similar to 10 gin showed no ferroelectric hysteresis loop, a PZT film annealed at 600 degrees C showed a remanent polarization of similar to 26 mu C/cm(2) and a coercive field of similar to 110 kV/cm.

引用

页码：3240 / 3241

页数：2

共 15 条

[1]

Microstructure and electrical properties of lead zirconate titanate (Pb(Zr52/Ti48)O3) thick films deposited by aerosol deposition method [J].