Lattice parameter in GaNAs epilayers on GaAs: Deviation from Vegard's law

被引:132
作者
Li, W
Pessa, M
Likonen, J
机构
[1] Tampere Univ Technol, Optoelect Res Ctr, FIN-33101 Tampere, Finland
[2] Tech Res Ctr Finland, FIN-02044 Espoo, Finland
关键词
D O I
10.1063/1.1370549
中图分类号
O59 [应用物理学];
学科分类号
摘要
The N content and lattice parameter of GaN(x)As(1-x)epilayers on GaAs (0 < x < 0.03) were determined by secondary ion mass spectroscopy and x-ray diffraction measurements, respectively. A significant deviation of the lattice parameter variation in GaNxAs1-x from Vegard's law between GaAs and cubic GaN was observed, which leads to overestimation of the nitrogen content by up to 30% for x less than or equal to 2.5%. The physical origin of this negative deviation is discussed. (C) 2001 American Institute of Physics.
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页码:2864 / 2866
页数:3
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