Conducting polymers in microelectronics

被引:238
作者
Angelopoulos, M [1 ]
机构
[1] IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1147/rd.451.0057
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
Conjugated polymers in the nondoped and doped conducting state have an array of potential applications in the microelectronics industry. Conducting polymers are effective discharge layers as well as conducting resists in electron beam lithography, find applications in metallization (electrolytic and electroless) of plated through-holes for printed circuit board technology, provide excellent electrostatic discharge protection for packages and housings of electronic equipment, provide excellent corrosion protection for metals, and may have applications in electromagnetic interference shielding. This paper reviews some of these applications and briefly describes possible future applications of conducting polymers for use as interconnections or for electronic devices.
引用
收藏
页码:57 / 75
页数:19
相关论文
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