Integration of ZnO microcrystals with tailored dimensions forming light emitting diodes and UV photovoltaic cells

被引:98
作者
Cole, Jesse J. [1 ]
Wang, Xinyu [1 ]
Knuesel, Robert J. [1 ]
Jacobs, Heiko O. [1 ]
机构
[1] Univ Minnesota, Minneapolis, MN 55455 USA
基金
美国国家科学基金会;
关键词
D O I
10.1021/nl0804809
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
This article reports a new integration approach to produce arrays of ZnO microcrystals for optoelectronic and photovoltaic applications. Demonstrated applications are n-ZnO/p-GaN heterojunction LEDs and photovoltaic cells. The integration process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium doped GaN substrates to define a narrow sub-100 nm width nucleation region. Nucleation is followed by lateral epitaxial overgrowth producing single crystal disks of ZnO with desired size over 2 in. wafers. The process provides control over the dimensions (< 1% STD) and the location (0.7% STD pitch variation) of the ZnO crystals. The quality of the patterned ZnO is high; the commonly observed defect related emission in the electroluminescence spectra is completely suppressed, and a single near-band-edge UV peak is observed.
引用
收藏
页码:1477 / 1481
页数:5
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