共 10 条
[1]
BIN W, 1997, CHIN J SEMICONDUCTOR, V151, P31
[4]
Fu EG, 2002, RARE METAL MAT ENG, V31, P523
[5]
Hartnagel H. L., 1995, SEMICONDUCTING TRANS, P306
[10]
INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1974, 11 (04)
:666-670