Giant and stable conductivity switching behaviors in ZrO2 films deposited by pulsed laser depositions

被引:20
作者
Kim, S
Byun, I
Hwang, I
Kim, J
Choi, J
Park, BH [1 ]
Seo, S
Lee, MJ
Seo, DH
Suh, DS
Joung, YS
Yoo, IK
机构
[1] Konkuk Univ, Dept Phys, Seoul 143701, South Korea
[2] Samsung Adv Inst Technol, Suwon 440600, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2005年 / 44卷 / 8-11期
关键词
ZrO2 thin films; conductivity switching; on/off ratio; endurance; Schottky-type conduction;
D O I
10.1143/JJAP.44.L345
中图分类号
O59 [应用物理学];
学科分类号
摘要
ZrO2 films have been deposited on Pt/Ti/SiO2/Si substrates by pulsed laser deposition methods. Giant and stable conductivity switching behaviors with maximum on/off ratio of 10(6) and switching endurance of 10(5) times are observed in a typical Pt/ZrO2/Pt structure. The Pt/ZRO(2)/Pt structure exhibits two ohmic behaviors in the low-voltage region (V < 1.4 V) depending on the value of previously applied voltage and Schottky-type conduction in the high-voltage region (1.4V < V < 8.9 V). It seems that the conductivity switching behaviors result from the changes in both the Schottky barrier and the bulk conductivity controlled by applied voltages.
引用
收藏
页码:L345 / L347
页数:3
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