Automatic aligning and bonding system of PDMS layer for the fabrication of 3D microfluidic channels

被引:41
作者
Kim, JY
Baek, JY
Lee, KA
Lee, SH [1 ]
机构
[1] Dankook Univ, Dept Biomed Engn, Chungnam 330714, South Korea
[2] Dankook Univ, Dept Phys, Chungnam 330714, South Korea
关键词
PDMS; alignment; 3D fabrication; microfluidics;
D O I
10.1016/j.sna.2004.09.023
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes a novel system for the aligning and bonding of patterned poly(dimethylsiloxane) (PDMS) layers for the fabrication of 3D microfluidic channels. The system has the following three moving parts: (1) a rough manual back-and-forth movement for the placing of upper layer onto the lower layer, (2) a precise XYZ movement to align lower and upper layers with one another, and (3) the rotational movement for the angular matching of patterns. After the aligning, the primary curing for the bonding of aligned layers was performed on a preset heater without movement of the sample. The alignment-tests were performed for four groups (novice/manual, novice/automatic, expert/manual, expert/automatic) by using various-sized triangular patterns. The experiments demonstrate the existence of a statistically significant improvement in aligning quality in the automatic aligning group. Even to the novices who have fewer than one months' aligning experience, the aligning accuracy is similar to the manual alignment of the expert group having more than I year's manual alignment experience. The system can be applied efficiently to the 3D fabrication of microfluidic channels in the laboratory. (c) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:593 / 598
页数:6
相关论文
共 14 条
[1]   Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping [J].
Anderson, JR ;
Chiu, DT ;
Jackman, RJ ;
Cherniavskaya, O ;
McDonald, JC ;
Wu, HK ;
Whitesides, SH ;
Whitesides, GM .
ANALYTICAL CHEMISTRY, 2000, 72 (14) :3158-3164
[2]   An organic self-regulating microfluidic system [J].
Eddington, DT ;
Liu, RH ;
Moore, JS ;
Beebe, DJ .
LAB ON A CHIP, 2001, 1 (02) :96-99
[3]   Microreaction engineering - is small better? [J].
Jensen, KF .
CHEMICAL ENGINEERING SCIENCE, 2001, 56 (02) :293-303
[4]   Design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems [J].
Jeon, NL ;
Chiu, DT ;
Wargo, CJ ;
Wu, HK ;
Choi, IS ;
Anderson, JR ;
Whitesides, GM .
BIOMEDICAL MICRODEVICES, 2002, 4 (02) :117-121
[5]   DESIGN AND IMPLEMENTATION OF A NEW 4-QUADRANT MOS ANALOG MULTIPLIER [J].
KIM, CW ;
PARK, SB .
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 1992, 2 (02) :95-103
[6]   Microfluidic valve with cored glass microneedle for microinjection [J].
Lee, S ;
Jeong, W ;
Beebe, DJ .
LAB ON A CHIP, 2003, 3 (03) :164-167
[7]   Control mechanism of an organic self-regulating microfluidic system [J].
Lee, SH ;
Eddington, DT ;
Kim, YM ;
Kim, WS ;
Beebe, DJ .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (06) :848-854
[8]  
Madou M., 2002, FUNDAMENTALS MICROFA, P615
[9]   A method to maintain wafer alignment precision during adhesive wafer bonding [J].
Niklaus, F ;
Enoksson, P ;
Kälvesten, E ;
Stemme, G .
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 107 (03) :273-278
[10]   From micro- to nanofabrication with soft materials [J].
Quake, SR ;
Scherer, A .
SCIENCE, 2000, 290 (5496) :1536-1540