Integrated nanoelectronics for the future

被引：340

作者：

Chau, Robert

Doyle, Brian

Datta, Suman

Kavalieros, Jack

Zhang, Kevin

机构：

[1] Intel Corp, Component Res, Hillsboro, OR 97124 USA

[2] Intel Corp, Log Technol Dev Technol & Mfg Grp, Hillsboro, OR 97124 USA

来源：

NATURE MATERIALS | 2007年 / 6卷 / 11期

关键词：

D O I：

10.1038/nmat2014

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Integrated electronics has come a long way since the invention of the transistor in 1947 and the fabrication of the first integrated circuit in 1958. Given feature sizes as small as a few nanometres, what will the future hold for integrated electronics?

引用

页码：810 / 812

页数：3

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