Atomic structure studies of (113)B GaAs surfaces grown by metalorganic vapor phase epitaxy

被引:11
作者
Kawase, M [1 ]
Ishikawa, Y [1 ]
Fukui, T [1 ]
机构
[1] Hokkaido Univ, Res Ctr Interface Quantum Elect, Sapporo, Hokkaido 060, Japan
关键词
GaAs; metalorganic vapor phase epitaxy (MOVPE); ultrahigh-vacuum scanning tunneling microscopy (UHV-STM); reflection high-energy electron diffraction (RHEED); (113)B; surface reconstruction;
D O I
10.1016/S0169-4332(98)00101-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Microscopic structure on GaAs (113)B surface grown by metalorganic vapor phase epitaxy (MOVPE) is studied by reflection high-energy electron diffraction (RHEED) and ultrahigh-vacuum scanning tunneling microscopy (UHV-STM). Monolayer steps and wide terraces are observed on the (113)B GaAs surfaces similar to the case for (001) surfaces. On the wide terraces, small two-dimensional islands and holes are also recognized. RHEED patterns show streaks corresponding to the periods of about 0.8 nm perpendicular to [<3(3)over bar>2] direction and about 0.7 nm perpendicular to [110] direction, indicating the existence of the surface reconstruction. The period of 0.66 nm to [<3(3)over bar>2] direction is confirmed by STM observation, although the period to [110] direction cannot be confirmed. Based on these results, a possible model for the reconstruction structure on GaAs (113)B surface is proposed, and the stability of (113)B GaAs surface is discussed. (C) 1998 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:457 / 463
页数:7
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