Spontaneous formation of patterns on sputtered surfaces

被引：29

作者：

Chason, E

Aziz, MJ

机构：

[1] Brown Univ, Div Engn, Providence, RI 02912 USA

[2] Harvard Univ, Div Engn & Appl Sci, Cambridge, MA 02138 USA

来源：

SCRIPTA MATERIALIA | 2003年 / 49卷 / 10期

关键词：

self-organization and patterning; surface structure; ion beam processing; sputtering;

D O I：

10.1016/S1359-6462(03)00474-3

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Sputtering by collimated low energy ion beams can spontaneously create periodic structures on many surfaces. The pattern results from the balance between roughening by atom removal and smoothing, typically by surface diffusion. Experiments on a number of surfaces are considered in terms of linear and non-linear models of surface evolution. (C) 2003 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

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页码：953 / 959

页数：7

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