Improved room-temperature continuous wave GaAs/AlGaAs and InGaAs/GaAs/AlGaAs lasers fabricated on Si substrates via relaxed graded GexSi1-x buffer layers

被引:52
作者
Groenert, ME
Pitera, AJ
Ram, RJ
Fitzgerald, EA
机构
[1] MIT, Dept Mat Sci, Cambridge, MA 02139 USA
[2] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2003年 / 21卷 / 03期
关键词
D O I
10.1116/1.1576397
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Improved GaAs/AlGaAs quantum well lasers were fabricated with longer lifetimes, higher efficiencies, and lower threshold current densities than previously reported devices on Ge/GeSi relaxed graded buffers on Si substrates. Uncoated broad-area lasers operated continuously at 858 nm with a differential quantum efficiency of 0.40 and a threshold current density of 269 A/cm(2). Similar devices fabricated on GaAs substrates demonstrated nearly identical performance. Operating lifetimes on Si substrates were nearly 4 h, a 1 order of magnitude improvement over previous devices. In addition, strained InGaAs quantum well lasers have been operated continuously at room temperature on Ge/GeSi/Si substrates with a differential quantum efficiency of 0.26 and a threshold current density of 700 A/cm(2). Electroluminescence analyses of the failure behavior of both types of devices have suggested that recombination-enhanced defect reactions are limiting laser lifetime on Si substrates. (C) 2003 American Vacuum Society.
引用
收藏
页码:1064 / 1069
页数:6
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