共 74 条
[7]
CHEMICALLY ASSISTED ION-BEAM ETCHING OF GAAS, TI, AND MO
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1983, 1 (02)
:701-704
[8]
DOBSON PS, 1977, I PHYS C SER A, V33, P419