Microstructure dependent switching properties of VO2 thin films

被引:46
作者
Lappalainen, Jyrki [1 ]
Heinilehto, Sanau [1 ]
Saukko, Sami [1 ]
Lantto, Who [1 ]
Jantunen, Heli [1 ]
机构
[1] Univ Oulu, Microelect & Mat Phys Labs, Dept Elect & Informat Engn, EMPART Res Grp Infotech Oulu, FIN-90014 Oulu, Finland
关键词
metal-insulator transition; vanadium dioxides pulsed laser deposition; microstructure;
D O I
10.1016/j.sna.2007.05.002
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Vanadium dioxide (VO2) thin films with different microstructure and orientations were deposited on sapphire and MgO substrates using pulsed laser deposition technique (PLD). X-ray diffraction (XRD), scanning probe microscopy (SPM), resistivity, and spectrophotometry measurements were used to analyze the effect of microstructure and orientation on the metal-insulator transition (MIT) characteristics of the films in order to optimize film properties for IR wavelength optical shutters. Films with five different epitaxial in plane orientations including (100), (001), (020), (011), and (111), and polycrystalline films were deposited by varying substrate orientation and partial oxygen pressure. Depending on the crystal orientation, microstructure, and thickness, films performed 3-4 decades MIT in resistivity with varying transition temperatures and hysteresis loop widths. Metal state transmittance at the wavelength of 1.5 mu m as low as 0.1% was measured leading to optical density of OD lambda approximate to 10(5). Steepest transitions and narrow hysteresis loops were found in the films with lowest lattice misfit strain and in the polycrystalline structures, where residual macroscopic stress was relaxed due to cracking. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:250 / 255
页数:6
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