Annealing effects on opto-electronic properties of sputtered and thermally evaporated indium-tin-oxide films

被引：92

作者：

Morgan, DV ^{[1
]}

Aliyu, YH ^{[1
]}

Bunce, RW ^{[1
]}

Salehi, A ^{[1
]}

机构：

[1] Univ Wales, Cardiff Sch Engn, Div Elect, Cardiff CF2 1XH, S Glam, Wales

来源：

THIN SOLID FILMS | 1998年 / 312卷 / 1-2期

关键词：

opto-electronic property; post-deposition annealing; indium tin oxide;

D O I：

10.1016/S0040-6090(97)00733-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effects of post-deposition annealing in different atmospheres, on electrical anti optical properties of sputtered and thermally evaporated indium tin oxide (ITO) films, have been investigated. Significant variations in resistivity, mobility, carrier concentration and transparency were observed. X-ray diffraction patterns (XRD) and scanning electron microscopy (SEM) showed changes in the film grain structures after thermal treatment, Optimum properties were obtained under N-2/H-2 conditions giving resistivity values around 3 x 10(-4) Omega cm and transmittance values more than 90%. (C) 1995 Elsevier Science S.A.

引用

页码：268 / 272

页数：5

共 12 条

[1] ALGAINP LEDS USING REACTIVE THERMALLY EVAPORATED TRANSPARENT CONDUCTING INDIUM TIN OXIDE (ITO) [J].

ALIYU, YH ;

MORGAN, DV ;

THOMAS, H ;

BLAND, SW .

ELECTRONICS LETTERS, 1995, 31 (19) :1691-1692

[2] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[3] ELECTRICAL, OPTICAL AND CHEMICAL-PROPERTIES OF INDIUM TIN OXIDIZED FILMS GROWN BY SEQUENTIAL ELECTRON-BEAM DEPOSITION OF INDIUM AND TIN [J].

KULKARNI, AK ;

KNICKERBOCKER, SA .

THIN SOLID FILMS, 1992, 220 (1-2) :321-326

[4] HIGH-FREQUENCY GAAS/AL0.25GA0.75AS HETEROJUNCTION BIPOLAR-TRANSISTORS WITH TRANSPARENT INDIUM-TIN-OXIDE EMITTER CONTACTS [J].

LI, WQ ;

KARAKUCUK, M ;

KULMAN, J ;

EAST, JR ;

HADDAD, GI ;

BHATTACHARYA, PK .

ELECTRONICS LETTERS, 1993, 29 (25) :2223-2225

[5] OPTICALLY TRANSPARENT INDIUM-TIN-OXIDE (ITO) OHMIC CONTACTS IN THE FABRICATION OF VERTICAL-CAVITY SURFACE-EMITTING LASERS [J].

MATIN, MA ;

JEZIERSKI, AF ;

BASHAR, SA ;

LACKLISON, DE ;

BENSON, TM ;

CHENG, TS ;

ROBERTS, JS ;

SALE, TE ;

ORTON, JW ;

FOXON, CT ;

REZAZADEH, AA .

ELECTRONICS LETTERS, 1994, 30 (04) :318-320

[6] THE THERMAL-STABILITY OF INDIUM TIN OXIDE/N-GAAS SCHOTTKY CONTACTS [J].

MORGAN, DV ;

ALIYU, Y ;

BUNCE, RW .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1992, 133 (01) :77-93

[7] RADIATION-DAMAGE IN INDIUM TIN OXIDE (ITO) LAYERS [J].

MORGAN, DV ;

SALEHI, A ;

ALIYU, YH ;

BUNCE, RW ;

DISKETT, D .

THIN SOLID FILMS, 1995, 258 (1-2) :283-285

[8]

MORGAN DV, 1994, WORKSH COMP SEM DEV, P73

[9] THE INFLUENCE OF SUBSTRATE-TEMPERATURE AND SPUTTERING GAS ATMOSPHERE ON THE ELECTRICAL-PROPERTIES OF REACTIVELY SPUTTERED INDIUM TIN OXIDE-FILMS [J].

NISHIKAWA, S .

THIN SOLID FILMS, 1986, 135 (02) :219-228

[10]

SALEHI A, 1995, THESIS U WALES UK

← 1 2 →