OPTICALLY TRANSPARENT INDIUM-TIN-OXIDE (ITO) OHMIC CONTACTS IN THE FABRICATION OF VERTICAL-CAVITY SURFACE-EMITTING LASERS

被引：25

作者：

MATIN, MA

JEZIERSKI, AF

BASHAR, SA

LACKLISON, DE

BENSON, TM

CHENG, TS

ROBERTS, JS

SALE, TE

ORTON, JW

FOXON, CT

REZAZADEH, AA

机构：

[1] UNIV LONDON KINGS COLL,DEPT ELECTR & ELECT ENGN,LONDON WC2R 2LS,ENGLAND

[2] UNIV SHEFFIELD,DEPT ELECTR & ELECT ENGN,SHEFFIELD S1 4DU,ENGLAND

来源：

ELECTRONICS LETTERS | 1994年 / 30卷 / 04期

关键词：

OHMIC CONTACTS; LASERS;

D O I：

10.1049/el:19940243

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors report what they believe to be the first successful fabrication of an InGaAs/GaAs vertical-cavity surface emitting laser (VCSEL) using optically transparent indium-tin-oxide (ITO) ohmic contacts to p- and n-type regions of the laser. Threshold current densities J(th) are similar to those lasers fabricated from the same wafer using conventional ohmic contacts.

引用

页码：318 / 320

页数：3

共 8 条

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