A two-axis tip-tilt platform for x-ray interferometry

被引：9

作者：

Bergamin, A ^{[1
]}

Cavagnero, G ^{[1
]}

Durando, G ^{[1
]}

Mana, G ^{[1
]}

Massa, E ^{[1
]}

机构：

[1] CNR, Ist Metrol G Colonnetti, I-10135 Turin, Italy

来源：

MEASUREMENT SCIENCE AND TECHNOLOGY | 2003年 / 14卷 / 06期

关键词：

atomic scale displacement metrology; ultraprecision positioning control system; x-ray interferometry; BEHAVIOR;

D O I：

10.1088/0957-0233/14/6/303

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We describe the design and demonstrate a two-axis tip-tilt platform stacked on a translation stage for combined x-ray and optical interferometry. The platform is electronically controlled to compensate for parasitic rotations and straightness errors. The key characteristic of the platform is the way in which it carries out translations and rotations by sliding. In spite of the potential stop-and-go motion, an x-ray interferometer was successfully operated and guiding errors were kept to within 1 nrad and 1 nm. The platform made it possible to move the x-ray interferometer by up to a couple of millimetres. In addition, the combined x-ray and optical interferometer allowed us to investigate the microdynamics of sliding.

引用

收藏

页码：717 / 723

页数：7

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