Fabrication of double-length-scale patterns via lithography, block copolymer templating, and Electrodeposition

被引:32
作者
Tseng, Yu-Tsan
Tseng, Wen-Hsien
Lin, Cheng-Hsuan
Ho, Rong-Ming [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Chem Engn, Hsinchu 30013, Taiwan
[2] Ind Technol Res Inst, Mat Chem Res Labs, Hsinchu 30013, Taiwan
[3] Natl Tsing Hua Univ, Dept Chem Engn, Hsinchu 30013, Taiwan
关键词
D O I
10.1002/adma.200700042
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A straightforward and effective method for the fabrication of double-length-scale patterned (i.e., composite micro- and nanopatterned) carbon nanotube (CNT) arrays can be achieved by block copolymer templating on a prepatterned conducting substrate followed by electroplating to deposit Ni (see figure). Significant improvement in the current density with low threshold voltage and high field-emission efficiency can be found in the composite micro- and nanopatterns of CNT arrays.
引用
收藏
页码:3584 / +
页数:6
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