Electro-optical properties of (Pb, La)(Zr, Ti)O3 films prepared by aerosol deposition method

被引:21
作者
Nakada, M
Ohashi, K
Lebedev, M
Akedo, J
机构
[1] NEC Corp Ltd, Fundamental Res Labs, Tsukuba, Ibaraki 3058501, Japan
[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058564, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2003年 / 42卷 / 9B期
关键词
aerosol deposition; PUT; electro-optical effect; thick film; transparent film;
D O I
10.1143/JJAP.42.5960
中图分类号
O59 [应用物理学];
学科分类号
摘要
Electro-optically active and highly transparent lanthanum-modified lead zirconate titanate [PLZT, Pb0.91La0.09(Zr0.65Ti0.35)O-3] films over 1 mum thick were deposited directly on glass substrates using an aerosol deposition method. An optical transmittance of 70% at the wavelength of 800 nm was obtained for a 4.5-mum-thick PLZT film with a reflection loss of 20% at the film and substrate, surfaces. A quadratic electro-optical response with a slim loop was, observed, consistent with the expected bulk response. The quadratic electro-optical coefficient was 2.5 x 10(-18) m(2)/V-2, comparable to that of films deposited on buffer layers using a sol-gel method. These results indicate that aerosol deposition provides a superior method for depositing the layers of optical devices.
引用
收藏
页码:5960 / 5962
页数:3
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