Effect of thickness on the piezoelectric properties of lead zirconate titanate films fabricated by aerosol deposition method

被引：35

作者：

Lebedev, M ^{[1
]}

Akedo, J ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, AIST, Tsukuba, Ibaraki 3058564, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 11B期

关键词：

piezoelectric film; aerosol deposition method; lead zirconate titanate; internal stress; thickness dependence; coercive field; breakdown voltage;

D O I：

10.1143/JJAP.41.6669

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Dense lead zirconate titanate (PZT) films in the thickness range of 2-100 mum were fabricated by the aerosol deposition method (ADM) to study the thickness dependence of the ferroelectric characteristics. The recovery of ferroelectricity by annealing is uniform inside a thick PZT film. Breakdown electrical field increased with decreasing thickness of the film and was over 1 MV/cm for a 4-mum-thick PZT film. Increase of the internal stress for thinner PZT films led to the increase of the coercive field and breakdown electrical strength.

引用

页码：6669 / 6673

页数：5

共 24 条

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