Interpretation of neutral distribution through spatial profile of plasma emission

被引：14

作者：

Lee, PW

Chang, HY

机构：

[1] Department of Physics, Korea Adv. Inst. Sci. and Technol., Taejon 305-701, 373-1 Kusung-dong, Yusung-ku

来源：

PHYSICS LETTERS A | 1996年 / 213卷 / 3-4期

关键词：

D O I：

10.1016/0375-9601(96)00131-4

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Using a new optical probe technique, plasma emission and its spatial profile are monitored at various gas pressures in electron cyclotron resonance Ar plasma. The emission intensity and its spatial profile strongly depend on the neutral gas pressure. In a spatial plasma emission profile, a hollow profile appears at the chamber center in a specific pressure region. It is suggested that the neutral density depletion at the center is caused by the plasma collisional heating that takes place during ion-neutral charge exchange and ion-neutral elastic collisions.

引用

页码：186 / 190

页数：5

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