The microstructure of Pb(Zr,Ti)O-3 and Pb(Zr, Ti)O-3/YBa2Cu3O7 films

被引:12
作者
Cao, LX [1 ]
Xu, Y [1 ]
Zhao, BR [1 ]
Guo, LP [1 ]
Liu, JZ [1 ]
Xu, B [1 ]
Wu, F [1 ]
Li, L [1 ]
Zhao, ZX [1 ]
Zhu, AJ [1 ]
Mai, ZH [1 ]
Zhao, JH [1 ]
Fu, YF [1 ]
Li, XJ [1 ]
机构
[1] HUAZHONG UNIV SCI & TECHNOL,DEPT SOLID STATE ELECTR,WUHAN 430074,PEOPLES R CHINA
关键词
D O I
10.1088/0953-2048/9/4/008
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pb(Zr0.53Ti0.47)O-3 (PZT 53/47) is a polycrystalline film with coarse square-shaped grains. The surface morphology can be improved by reducing the cooling rate at the Curie temperature region; however this morphology still does not meet the requirement of device engineering. Pb(Zr0.2Ti0.8)O-3 (PZT 20/80) film has been synthesized, to reduce the lattice mismatch between PZT and substrate. This film has a smooth surface without any evident crystalline features. A TEM of the cross-sectional PZT/YBa2Cu3O7 (YBCO) integrated film shows there is no interaction between the PZT, YBCO and substrate. ZrO2 particles are detected in the PZT film.
引用
收藏
页码:310 / 314
页数:5
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