Patterned transfer of metallic thin film nanostructures by water-soluble polymer templates

被引：59

作者：

Schaper, CD ^{[1
]}

机构：

[1] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA

来源：

NANO LETTERS | 2003年 / 3卷 / 09期

关键词：

D O I：

10.1021/nl034412s

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Water-soluble polymer templates are replicated from surface patterns by spin-casting a poly(vinyl alcohol) film-forming solution that undergoes a room-temperature evaporation process to solidify in less than 1 min with lateral resolution of sub-100 nm. The patterned polymer templates are deposited with metal and coupled to substrate surfaces by methods that may include photocurable materials, two-component reaction systems, or direct bonding without an intervening adhesion layer. Water is used to dissolve the flexible polymer templates at the conclusion of the transfer process.

引用

页码：1305 / 1309

页数：5

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