Effects of deposition and post-fabrication conditions on photoluminescent properties of nanostructured Si/SiOx films prepared by laser ablation

被引:18
作者
Kabashin, AV
Charbonneau-Lefort, M
Meunier, M
Leonelli, R
机构
[1] Ecole Polytech, Dept Genie Phys, Montreal, PQ H3C 3A7, Canada
[2] Univ Montreal, Dept Phys, Montreal, PQ H3C 3J7, Canada
关键词
pulsed laser ablation; silicon nanoparticles; photoluminescence;
D O I
10.1016/S0169-4332(00)00780-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Pulsed Laser ablation (PLA) from a Si target in an inert He ambient has been used to produce Si/SiOx nanostructured thin films on Si substrates. After the film exposition to atmospheric air, they exhibited photoluminescence (PL) signals with peak energy between 1.58 and 2.15 eV. It was found that both natural and thermal oxidation of the films can cause dramatic changes in PL properties giving rise to the appearance or considerable enhancement of fixed Pt peaks around 1.6-1.65 and 2.2-2.25 eV, Quite different time-dependent PL degradation behavior under continuous laser irradiation gives an evidence for different mechanisms responsible for the PL peaks, Possible origins of Pt are discussed. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:328 / 331
页数:4
相关论文
共 10 条
[1]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[2]   PHOTOLUMINESCENCE OF OXIDIZED SILICON NANOCLUSTERS DEPOSITED ON THE BASAL-PLANE OF GRAPHITE [J].
DINH, LN ;
CHASE, LL ;
BALOOCH, M ;
TERMINELLO, LJ ;
WOOTEN, F .
APPLIED PHYSICS LETTERS, 1994, 65 (24) :3111-3113
[3]   Time-resolved imaging of gas phase nanoparticle synthesis by laser ablation [J].
Geohegan, DB ;
Puretzky, AA ;
Duscher, G ;
Pennycook, SJ .
APPLIED PHYSICS LETTERS, 1998, 72 (23) :2987-2989
[4]   VISIBLE PHOTOLUMINESCENCE FROM OXIDIZED SI NANOMETER-SIZED SPHERES - EXCITON CONFINEMENT ON A SPHERICAL-SHELL [J].
KANEMITSU, Y ;
OGAWA, T ;
SHIRAISHI, K ;
TAKEDA, K .
PHYSICAL REVIEW B, 1993, 48 (07) :4883-4886
[5]   Light emission from nanometer-sized silicon particles fabricated by the laser ablation method [J].
Makimura, T ;
Kunii, Y ;
Murakami, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (9A) :4780-4784
[6]   LUMINESCENCE FROM A SI-SIO2 NANOCLUSTER-LIKE STRUCTURE PREPARED BY LASER-ABLATION [J].
MOVTCHAN, IA ;
DREYFUS, RW ;
MARINE, W ;
SENTIS, M ;
AUTRIC, M ;
LELAY, G ;
MERK, N .
THIN SOLID FILMS, 1995, 255 (1-2) :286-289
[7]   Size dependent photoluminescence from Si nanoclusters produced by laser ablation [J].
Patrone, L ;
Nelson, D ;
Safarov, V ;
Sentis, M ;
Marine, W .
JOURNAL OF LUMINESCENCE, 1998, 80 (1-4) :217-221
[8]   LIGHT-EMISSION IN THERMALLY OXIDIZED POROUS SILICON - EVIDENCE FOR OXIDE-RELATED LUMINESCENCE [J].
PROKES, SM .
APPLIED PHYSICS LETTERS, 1993, 62 (25) :3244-3246
[9]   SYNTHESIS AND PROCESSING OF SILICON NANOCRYSTALLITES USING A PULSED-LASER ABLATION SUPERSONIC EXPANSION METHOD [J].
WERWA, E ;
SERAPHIN, AA ;
CHIU, LA ;
ZHOU, CX ;
KOLENBRANDER, KD .
APPLIED PHYSICS LETTERS, 1994, 64 (14) :1821-1823
[10]   Optical properties of silicon nanocrystallites prepared by excimer laser ablation in inert gas [J].
Yamada, Y ;
Orii, T ;
Umezu, I ;
Takeyama, S ;
Yoshida, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (2B) :1361-1365