Nanomechanical characterization of polymer using atomic force microscopy and nanoindentation

被引：46

作者：

Fang, TH

Chang, WJ ^{[1
]}

Tsai, SL

机构：

[1] Kun Shan Univ Technol, Dept Engn Mech, Tainan 710, Taiwan

[2] Southern Taiwan Univ Technol, Dept Mech Engn, Tainan 710, Taiwan

来源：

MICROELECTRONICS JOURNAL | 2005年 / 36卷 / 01期

关键词：

hardness; nanotribology; atomic force microscopy; nanoindentation; polymer;

D O I：

10.1016/j.mejo.2004.10.003

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The nanomechanical characteristics of polycarbonate (PC) polymer were investigated by atomic force microscope (AFM) and nanoindentation. Scratching, wear properties, hardness and Young's modulus were obtained. The relationships between scribing feed and speed, surface depth and roughness and applied load were also investigated. The results indicated that as the applied load was increased, the furrow depth and the surface roughness increased. When the scribing feed was increased, the depth and roughness decreased. Increasing the furrow speed also decreased the surface roughness. The applied load is more significant than the scribing speed on the material removal rate. In addition, the Young's modulus and hardness of the polycarbonate material were 1.8 and 0.2 GPa, respectively. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：55 / 59

页数：5

共 12 条

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