Solid-state dewetting for ordered arrays of crystallographically oriented metal particles

被引：200

作者：

Giermann, AL ^{[1
]}

Thompson, CV ^{[1
]}

机构：

[1] MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 12期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1885180

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate that topographically modified substrates can be used as templates to control solid-state dewetting of thin films by creating a periodic variation in the initial curvature of the film. The dewetting of gold films on oxidized silicon surfaces patterned with arrays of inverted pyramid shaped pits is investigated. For specific ranges of relative film thickness and topographic dimension, dewetting results in arrays of submicrometer-scale particles with uniform periodic spacing and nearly uniform size and crystallographic orientation. (C) 2005 American Institute of Physics.

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页码：1 / 3

页数：3

相关论文

共 18 条

[1] Magnetic properties of large-area particle arrays fabricated using block copolymer lithography [J].

Cheng, JY ;

Ross, CA ;

Thomas, EL ;

Smith, HI ;

Lammertink, RGH ;

Vancso, GJ .

IEEE TRANSACTIONS ON MAGNETICS, 2002, 38 (05) :2541-2543

[2] Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition [J].

Chhowalla, M ;

Teo, KBK ;

Ducati, C ;

Rupesinghe, NL ;

Amaratunga, GAJ ;

Ferrari, AC ;

Roy, D ;

Robertson, J ;

Milne, WI .

JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) :5308-5317

[3] Fabrication of large area nanostructured magnets by interferometric lithography [J].

Farhoud, M ;

Hwang, M ;

Smith, HI ;

Schattenburg, ML ;

Bae, JM ;

Youcef-Toumi, K ;

Ross, CA .

IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (04) :1087-1089

[4] CRYSTALLOGRAPHIC ORIENTATION OF SILICON ON AN AMORPHOUS SUBSTRATE USING AN ARTIFICIAL SURFACE-RELIEF GRATING AND LASER CRYSTALLIZATION [J].

GEIS, MW ;

FLANDERS, DC ;

SMITH, HI .

APPLIED PHYSICS LETTERS, 1979, 35 (01) :71-74

[5]

Giermann AL, 2004, MATER RES SOC SYMP P, V818, P37

[6] CAPILLARY INSTABILITIES IN THIN-FILMS [J].

JIRAN, E ;

THOMPSON, CV .

JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (11) :1153-1160

[7] CAPILLARY INSTABILITIES IN THIN, CONTINUOUS FILMS [J].

JIRAN, E ;

THOMPSON, CV .

THIN SOLID FILMS, 1992, 208 (01) :23-28

[8] Growth of amorphous silicon nanowires [J].

Liu, ZQ ;

Zhou, WY ;

Sun, LF ;

Tang, DS ;

Zou, XP ;

Li, YB ;

Wang, CY ;

Wang, G ;

Xie, SS .

CHEMICAL PHYSICS LETTERS, 2001, 341 (5-6) :523-528

[9]

Maier SA, 2001, ADV MATER, V13, P1501, DOI 10.1002/1521-4095(200110)13:19<1501::AID-ADMA1501>3.0.CO

[10]

2-Z