Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

被引：37

作者：

Cheng, YH

Tay, BK

Lau, SP

Shi, X

Qiao, XL

Chen, JG

Wu, YP

Xie, CS

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ion Beam proc Lab, Singapore 639798, Singapore

[2] Huazhong Univ Sci & Technol, Inst Mat Sci & Engn, Wuhan 430074, Hubei, Peoples R China

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 73卷 / 03期

关键词：

D O I：

10.1007/s003390100725

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-are (FCVA) technique combined with a radiofrequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films, The UV Raman spectra can be directly used to determine the sp(3) C atoms in carbon nitride films. Both C-N bonds and C = N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp(3) C fraction, and an increase of the sp(2) C fraction, the sp(2) C cluster size, the C-N bond fraction and the C = N bond fraction in carbon nitride films.

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页码：341 / 345

页数：5

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