Raman spectroscopy of carbon nitride films deposited using the filtered cathodic vacuum-arc technique combined with a radio-frequency nitrogen-ion beam

被引：37

作者：

Cheng, YH

Tay, BK

Lau, SP

Shi, X

Qiao, XL

Chen, JG

Wu, YP

Xie, CS

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ion Beam proc Lab, Singapore 639798, Singapore

[2] Huazhong Univ Sci & Technol, Inst Mat Sci & Engn, Wuhan 430074, Hubei, Peoples R China

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 73卷 / 03期

关键词：

D O I：

10.1007/s003390100725

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Ultraviolet (UV) and visible micro-Raman-scattering spectroscopy were used to study carbon nitride films deposited using an off-plane double-bend-filtered cathodic vacuum-are (FCVA) technique combined with a radiofrequency nitrogen-ion source, which was used to supply active nitrogen species during the deposition of carbon nitride films, The UV Raman spectra can be directly used to determine the sp(3) C atoms in carbon nitride films. Both C-N bonds and C = N bonds can also be observed from the deconvolution results of visible and UV Raman spectra for carbon nitride films. The increase of nitrogen-ion energy leads to a decrease of the sp(3) C fraction, and an increase of the sp(2) C fraction, the sp(2) C cluster size, the C-N bond fraction and the C = N bond fraction in carbon nitride films.

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页码：341 / 345

页数：5

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共 30 条

[21] RESONANT RAMAN-SCATTERING OF HYDROGENATED AMORPHOUS-CARBON - EVIDENCE FOR PI-BONDED CARBON CLUSTERS [J].

RAMSTEINER, M ;

WAGNER, J .

APPLIED PHYSICS LETTERS, 1987, 51 (17) :1355-1357

[22] Correlation of Raman spectra with the diamond-like properties of amorphous hydrogen-free carbon films prepared by a pulsed are discharge method [J].

Stanishevsky, AV ;

Khriachtchev, LY .

DIAMOND AND RELATED MATERIALS, 1996, 5 (11) :1355-1358

[23] XPS and FTIR analysis of nitrogen incorporation in CNx thin films [J].

Tabbal, M ;

Merel, P ;

Moisa, S ;

Chaker, M ;

Gat, E ;

Ricard, A ;

Moisan, M ;

Gujrathi, S .

SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3) :1092-1096

[24] Shielded are ion plating and structural characterization of amorphous carbon nitride thin films [J].

Taki, Y ;

Kitagawa, T ;

Takai, O .

THIN SOLID FILMS, 1997, 304 (1-2) :183-190

[25] Composition and crystal structure of carbon nitride films prepared by the electron cyclotron resonance plasma sputtering method [J].

Tani, Y ;

Aoi, Y ;

Kamijo, E .

APPLIED PHYSICS LETTERS, 1998, 73 (12) :1652-1654

[26] C:N and C:N:O films: Preparation and properties [J].

Vorlicek, V ;

Siroky, P ;

Sobota, J ;

Perina, V ;

Zelezny, V ;

Hrdina, J .

DIAMOND AND RELATED MATERIALS, 1996, 5 (3-5) :570-574

[27] STRUCTURE, DYNAMICS, AND ELECTRONIC-PROPERTIES OF DIAMOND-LIKE AMORPHOUS-CARBON [J].

WANG, CZ ;

HO, KM .

PHYSICAL REVIEW LETTERS, 1993, 71 (08) :1184-1187

[28] Characteristics of carbon nitride films prepared by magnetic filtered plasma stream [J].

Wei, AX ;

Chen, DH ;

Ke, N ;

Peng, SQ ;

Wong, SP .

THIN SOLID FILMS, 1998, 323 (1-2) :217-221

[29] CHEMICAL PREPARATION AND SHOCK-WAVE COMPRESSION OF CARBON NITRIDE PRECURSORS [J].

WIXOM, MR .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (07) :1973-1978

[30] Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp(3) fraction deposited using a filtered cathodic arc [J].

Xu, S ;

Flynn, D ;

Tay, BK ;

Prawer, S ;

Nugent, KW ;

Silva, SRP ;

Lifshitz, Y ;

Milne, WI .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1997, 76 (03) :351-361