Formation and evolution of self-assembled crystalline Si nanorings on (001)Si mediated by Au nanodots

被引：14

作者：

He, JH ^{[1
]}

Wu, WW ^{[1
]}

Chueh, YL ^{[1
]}

Hsin, CL ^{[1
]}

Chen, LJ ^{[1
]}

Chou, LJ ^{[1
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2005年 / 87卷 / 22期

关键词：

D O I：

10.1063/1.2136219

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The growth of high-density Si nanorings has been achieved on ultrathin Au films on silicon substrate. Nanorings, which are gold-free and epitaxially grown on (001) Si, had a narrow distribution of height and diameter of 1.4 +/- 0.3 and 24.9 +/- 4.0 nm, with a density of 4.3x10(10) cm(-2). In situ ultrahigh-vacuum transmission electron microscopy revealed that the formation of nanorings involves a mechanism mediated by Au nanodots and evaporation of Au-Si eutectic liquid droplets at high temperature. The process promises to be an effective nanofabrication technique to produce high-density and uniform-sized nanorings. (c) 2005 American Institute of Physics.

引用

页码：1 / 3

页数：3

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