Blue shift in room temperature photoluminescence from photo-chemical vapor deposited ZnO films

被引：114

作者：

Lee, GH

Yamamoto, Y

Kourogi, M

Ohtsu, M

机构：

[1] Japan Sci & Technol Corp, Machida, Tokyo 1940004, Japan

[2] Tokyo Inst Technol, Interdisciplinary Grad Sch & Engn, Midori Ku, Yokohama, Kanagawa 2268508, Japan

来源：

THIN SOLID FILMS | 2001年 / 386卷 / 01期

关键词：

zinc oxide; chemical vapor deposition; luminescence; optical properties;

D O I：

10.1016/S0040-6090(01)00764-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Highly transparent ZnO films were deposited on (001) alpha -Al2O3 at substrate temperature in the range of room temperature to 300 degreesC by photo-chemical vapor deposition, This enabled selective deposition of ZnO films on the selected substrate area irradiated by the light source. With the descending substrate temperature as low as 100 degreesC, band gap widening of the films has been observed, which resulted in the shift of room temperature ultraviolet photoluminescence of ZnO from 380 nm to the shorter wavelength of 360 nm. It implies that in situ patterning of ZnO with different wavelength emission characteristics is possible on the same substrate by controlling the deposition temperature. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

收藏

页码：117 / 120

页数：4

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