Fabrication of ZnO nanostructure using near-field optical technology

被引：14

作者：

Lee, GH ^{[1
]}

Yamamoto, Y ^{[1
]}

Kourogi, M ^{[1
]}

Ohtsu, M ^{[1
]}

机构：

[1] Japan Sci & Technol Corp, Machida, Tokyo 1940004, Japan

来源：

NEAR-FIELD OPTICS: PHYSICS, DEVICES, AND INFORMATION PROCESSING | 1999年 / 3791卷

关键词：

ZnO nanodot; photo-enhanced chemical vapor deposition (PE-MOCVD); optical near-field;

D O I：

10.1117/12.363850

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

ZnO nanodots have been successfully fabricated on a (001) Al2O3 substrate by photo-enhanced chemical vapor deposition (PE-MOCVD) combined with near-field optical technology. The optical near-field generated from an optical fiber probe tip allowed ZnO dots to selectively grow on the irradiated substrate surface, with a size smaller than the wavelength of the light source (lambda=244nm). The crystallinity and composition of ZnO were evaluated from planar films using x-ray diffraction analysis, optical transmittance and x-ray photoelectron spectroscopy (XPS). The planar films were grown using PE-MOCVD with a direct irradiation by an ultraviolet light source without probe tip. Above a deposition temperature of 150 degrees C, stoichiometric ZnO films (R O:zn=1), strongly the c-axis oriented and exhibiting a band gap of about 3.3 eV were obtained.

引用

页码：132 / 139

页数：8

共 17 条

[1] Optically pumped lasing of ZnO at room temperature [J].

Bagnall, DM ;

Chen, YF ;

Zhu, Z ;

Yao, T ;

Koyama, S ;

Shen, MY ;

Goto, T .

APPLIED PHYSICS LETTERS, 1997, 70 (17) :2230-2232

[2] Laser-chemical processing: Recent developments [J].

Bauerle, D .

APPLIED SURFACE SCIENCE, 1996, 106 :1-10

[3] Second harmonic generation in laser ablated zinc oxide thin films [J].

Cao, H ;

Wu, JY ;

Ong, HC ;

Dai, JY ;

Chang, RPH .

APPLIED PHYSICS LETTERS, 1998, 73 (05) :572-574

[4] CHARACTERISTICS OF HIGH-QUALITY ZNO THIN-FILMS DEPOSITED BY PULSED-LASER DEPOSITION [J].

CRACIUN, V ;

ELDERS, J ;

GARDENIERS, JGE ;

BOYD, IW .

APPLIED PHYSICS LETTERS, 1994, 65 (23) :2963-2965

[5] SPATIALLY DELINEATED GROWTH OF METAL-FILMS VIA PHOTOCHEMICAL PRE-NUCLEATION [J].

EHRLICH, DJ ;

OSGOOD, RM ;

DEUTSCH, TF .

APPLIED PHYSICS LETTERS, 1981, 38 (11) :946-948

[6] Substrate temperature dependence of ZnO films prepared by ultrasonic spray pyrolysis [J].

Ma, TY ;

Kim, SH ;

Moon, HY ;

Park, GC ;

Kim, YJ ;

Kim, KW .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (12A) :6208-6211

[7] SELECTIVE GROWTH OF GAAS INGAP HETEROSTRUCTURES BY PHOTO-ENHANCED ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION [J].

MAAYAN, E ;

KREININ, O ;

BAHIR, G ;

SALZMAN, J ;

EYAL, A ;

BESERMAN, R .

JOURNAL OF CRYSTAL GROWTH, 1994, 135 (1-2) :23-30

[8]

MADELUNG O, 1982, LANDOLTBORNSTEIN B, V17

[9] Fabrication of a triple tapered probe for near-field optical spectroscopy in UV region based on selective etching of a multistep index fiber [J].

Mononobe, S ;

Saiki, T ;

Suzuki, T ;

Koshihara, S ;

Ohtsu, M .

OPTICS COMMUNICATIONS, 1998, 146 (1-6) :45-48

[10] PROGRESS OF HIGH-RESOLUTION PHOTON SCANNING-TUNNELING-MICROSCOPY DUE TO A NANOMETRIC FIBER PROBE [J].

OHTSU, M .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1995, 13 (07) :1200-1221

← 1 2 →