New functions of scanning nonlinear dielectric microscopy - Higher-order measurement and vertical resolution

被引：16

作者：

Cho, YS ^{[1
]}

Ohara, K ^{[1
]}

Koike, A ^{[1
]}

Odagawa, H ^{[1
]}

机构：

[1] Tohoku Univ, Elect Commun Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 5B期

关键词：

scanning nonlinear dielectric microscopy; nonlinear dielectric constant; scanning probe microscopy;

D O I：

10.1143/JJAP.40.3544

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated new features (functions) of scanning nonlinear dielectric microscopy (SNDM), namely, higher-order nonlinear dielectric imaging and the very high vertical resolution. The resolution of the higher-order nonlinear dielectric imaging is higher than that of the conventional nonlinear dielectric imaging which detects the lowest order of the nonlinear dielectric constant. The very high vertical resolution of SNDM is also reported. These features of the SNDM enable us to obtain a new microscopy for measuring the topography or a new displacement sensor with extremely high sensitivity.

引用

页码：3544 / 3548

页数：5

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