One-step micropatterning of highly-ordered semi-crystalline poly(vinylidene fluoride-co-trifluoroethylene) films by a selective shear and detachment process

被引：8

作者：

Chang, Jiyoun ^{[1
]}

Jung, Hee Joon ^{[1
]}

Jeong, Huisu ^{[2
]}

Park, Youn Jung ^{[1
]}

Sung, Jinwoo ^{[1
]}

Kang, Seok Ju ^{[1
]}

Jung, Gun Young ^{[2
]}

Sung, Myung M. ^{[3
]}

Park, Cheolmin ^{[1
]}

机构：

[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea

[2] GIST, Dept Mat Sci & Engn, Kwangju 500712, South Korea

[3] Hanyang Univ, Dept Chem, Seoul 133791, South Korea

来源：

ORGANIC ELECTRONICS | 2011年 / 12卷 / 01期

关键词：

Ferroelectric polymer; Static shear; Detachment; Micropattern; Crystal orientation; Non-volatile memory; THIN-FILMS; FLUORIDE); DEVICES; CRYSTALLIZATION; POLARIZATION; TRANSISTORS; MEMORIES; CRYSTALS;

D O I：

10.1016/j.orgel.2010.10.007

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We present a one-step route for micropatterning a thin ferroelectric poly(vinylidene fluoride-co-trifluoroethylene) (PVDF-TrFE) film with both molecular and microstructural crystal control over a large area. The method is based on the static mechanical shearing and ;subsequent detachment of a film spin coated on pre-patterned Al which has been lithographically prepared on a SiO2 substrate under appropriate thermal conditions. Selective detachment of the film in contact with the SiO2 substrate gave rise to micropatterns of PVDF-TrFE film positioned only on the Al regions. Further, the PVDF-TrFE film showed 25-nm-thick crystalline lamellae aligned perpendicular to the shear direction, wherein the c axis of the crystals was globally ordered parallel to the shear direction. The sheared and patterned PVDF-TrFE thin films are readily incorporated into non-volatile memory units of metal/ferroelectric/metal capacitors and bottom gate-top contact field effect transistors, leading to arrays of memory devices with enhanced performance. (C) 2010 Elsevier B. V. All rights reserved.

引用

页码：98 / 107

页数：10

共 40 条

[1] Composite thin films of poly(phenylene oxide)/poly(styrene) and PPO/silver via vapor phase deposition [J].

Bayer, I. S. ;

Biswas, A. ;

Tripathi, A. ;

Avasthi, D. K. ;

Singh, J. P. ;

Megaridis, C. M. .

POLYMERS FOR ADVANCED TECHNOLOGIES, 2009, 20 (10) :775-784

[2] Two-dimensional ferroelectric films [J].

Bune, AV ;

Fridkin, VM ;

Ducharme, S ;

Blinov, LM ;

Palto, SP ;

Sorokin, AV ;

Yudin, SG ;

Zlatkin, A .

NATURE, 1998, 391 (6670) :874-877

[3] Polymeric gate dielectric interlayer of cross-linkable poly(styrene-r-methylmethacrylate) copolymer for ferroelectric PVDF-TrFE field effect transistor memory [J].

Chang, Jiyoun ;

Shin, Chang Hak ;

Park, Youn Jung ;

Kang, Seok Ju ;

Jeong, Hee June ;

Kim, Kap Jin ;

Hawker, Craig J. ;

Russell, Thomas P. ;

Ryu, Du Yeol ;

Park, Cheolmin .

ORGANIC ELECTRONICS, 2009, 10 (05) :849-856

[4] Ferroelectric polymer Langmuir-Blodgett films for nonvolatile memory applications [J].

Ducharme, S ;

Reece, TJ ;

Othon, CM ;

Rannow, RK .

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2005, 5 (04) :720-735

[5] Ferroelectric switching dynamics in VDF-TrFE copolymer thin films spin coated on Si substrate [J].

Furukawa, T. ;

Kanai, S. ;

Okada, A. ;

Takahashi, Y. ;

Yamamoto, R. .

JOURNAL OF APPLIED PHYSICS, 2009, 105 (06)

[6] Ferroelectric field effect transistors using very thin ferroelectric polyvinylidene fluoride copolymer films as gate dielectrics [J].

Gerber, A. ;

Fitsilis, M. ;

Waser, R. ;

Reece, Timothy J. ;

Rije, E. ;

Ducharme, Stephen ;

Kohlstedt, H. .

JOURNAL OF APPLIED PHYSICS, 2010, 107 (12)

[7]

Hurt R.H., 2002, FUEL CHEM DIV PREPR, P423

[8] Shear-Induced Ordering of Ferroelectric Crystals in Spin-Coated Thin Poly(vinylidene fluoride-co-trifluoroethylene) Films [J].

Jung, Hee Joon ;

Chang, Jiyoun ;

Park, Youn Jung ;

Kang, Seok Ju ;

Lotz, Bernard ;

Huh, June ;

Park, Cheolmin .

MACROMOLECULES, 2009, 42 (12) :4148-4154

[9] Spin cast ferroelectric beta poly(vinylidene fluoride) thin films via rapid thermal annealing [J].

Kang, Seok Ju ;

Park, Youn Jung ;

Sung, Jinwoo ;

Jo, Pil Sung ;

Park, Cheolmin ;

Kim, Kap Jin ;

Cho, Beong Ok .

APPLIED PHYSICS LETTERS, 2008, 92 (01)

[10] Localized pressure-induced ferroelectric pattern arrays of semicrystalline poly(vinylidene fluoride) by microimprinting [J].

Kang, Seok Ju ;

Park, Youn Jung ;

Hwang, Jiyoung ;

Jeong, Hee June ;

Lee, Jong Soon ;

Kim, Kap Jin ;

Kim, Ho-Cheol ;

Huh, June ;

Park, Cheolmin .

ADVANCED MATERIALS, 2007, 19 (04) :581-+

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