Piezoelectric self-sensing of adsorption-induced microcantilever bending

被引：22

作者：

Adams, JD

Rogers, B ^{[1
]}

Manning, L

Hu, Z

Thundat, T

Cavazos, H

Minne, SC

机构：

[1] Univ Nevada, Dept Engn Mech, Reno, NV 89557 USA

[2] Univ Nevada, Nevada Ventures Nanosci Program, Reno, NV 89557 USA

[3] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA

[4] Nanodevices Inc, Santa Barbara, CA 93111 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 121卷 / 02期

关键词：

piezoelectric; cantilever; adsorption; bending; sensor;

D O I：

10.1016/j.sna.2005.03.058

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A self-sensing, self-actuating, piezoelectric microcantilever is used to detect adsorption-induced bending. Bending is measured by bringing the resonating cantilever into intermittent contact with a surface, the elevation of which is maintained by a piezotube in feedback. When the cantilever bends, its oscillatory amplitude changes and the piezotube is adjusted to compensate. Cantilever amplitude is detected using the voltage output of the piezoelectric film. Bending in this test was caused by mercury adsorption onto gold. A 50 ppb mercury concentration in nitrogen gas was detected. (c) 2005 Elsevier B.V. All rights reserved.

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页码：457 / 461

页数：5

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