Zn0.76Mg0.24O homojunction photodiode for ultraviolet detection

被引:53
作者
Liu, K. W. [1 ]
Shen, D. Z.
Shan, C. X.
Zhang, J. Y.
Yao, B.
Zhao, D. X.
Lu, Y. M.
Fan, X. W.
机构
[1] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, Key Lab Excites State Proc, Changchun 130033, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1063/1.2805816
中图分类号
O59 [应用物理学];
学科分类号
摘要
Zn0.76Mg0.24O p-n photodiode was fabricated on (0001) Al2O3 substrate by plasma-assisted molecular beam epitaxy. Ni/Au and In metals deposited using vacuum evaporation were used as p-type and n-type contacts, respectively. Current-voltage measurements on the device showed weak rectifying behavior. The photodetectors exhibited a peak responsivity at around 325 nm. The ultraviolet-visible rejection ratio (R325 nm/R400 nm) of four orders of magnitude was obtained at 6 V bias. The photodetector showed fast photoresponse with a rise time of 10 ns and fall time of 150 ns. In addition, the thermally limited detectivity was calculated as 1.8x10(10) cm Hz(1/2)/W at 325 nm, which corresponds to a noise equivalent power of 8.4x10(-12) W/Hz(1/2) at room temperature. (c) 2007 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 11 条
[1]   Electrical characterization of 1.8 MeV proton-bombarded ZnO [J].
Auret, FD ;
Goodman, SA ;
Hayes, M ;
Legodi, MJ ;
van Laarhoven, HA ;
Look, DC .
APPLIED PHYSICS LETTERS, 2001, 79 (19) :3074-3076
[2]   Realization of band gap above 5.0 eV in metastable cubic-phase MgxZn1-xO alloy films [J].
Choopun, S ;
Vispute, RD ;
Yang, W ;
Sharma, RP ;
Venkatesan, T ;
Shen, H .
APPLIED PHYSICS LETTERS, 2002, 80 (09) :1529-1531
[3]  
DONATI S, 2000, DEVICES CIRCUITS APP, P43
[4]   Realization of Mg(x=0.15)Zn(1-x=0.85)O-based metal-semiconductor-metal UV detector on quartz and sapphire [J].
Hullavarad, SS ;
Dhar, S ;
Varughese, B ;
Takeuchi, I ;
Venkatesan, T ;
Vispute, RD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005, 23 (04) :982-985
[5]   Molecular beam epitaxial growth of wide bandgap ZnMgO alloy films on (111)-oriented Si substrate toward UV-detector applications [J].
Koike, K ;
Hama, K ;
Nakashima, I ;
Takada, G ;
Ogata, K ;
Sasa, S ;
Inoue, M ;
Yano, M .
JOURNAL OF CRYSTAL GROWTH, 2005, 278 (1-4) :288-292
[6]   Zn0.8Mg0.2O-based metal-semiconductor-metal photodiodes on quartz for visible-blind ultraviolet detection [J].
Liu, K. W. ;
Zhang, J. Y. ;
Ma, J. G. ;
Jiang, D. Y. ;
Lu, Y. M. ;
Yao, B. ;
Li, B. H. ;
Zhao, D. X. ;
Zhang, Z. Z. ;
Shen, D. Z. .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (09) :2765-2768
[7]  
Narayan J, 2002, SOLID STATE COMMUN, V121, P9, DOI 10.1016/S0038-1098(01)00431-8
[8]   MgxZn1-xO as a II-VI widegap semiconductor alloy [J].
Ohtomo, A ;
Kawasaki, M ;
Koida, T ;
Masubuchi, K ;
Koinuma, H ;
Sakurai, Y ;
Yoshida, Y ;
Yasuda, T ;
Segawa, Y .
APPLIED PHYSICS LETTERS, 1998, 72 (19) :2466-2468
[9]   Formation of p-type MgZnO by nitrogen doping [J].
Wei, Z. P. ;
Yao, B. ;
Zhang, Z. Z. ;
Lu, Y. M. ;
Shen, D. Z. ;
Li, B. H. ;
Wang, X. H. ;
Zhang, J. Y. ;
Zhao, D. X. ;
Fan, X. W. .
APPLIED PHYSICS LETTERS, 2006, 89 (10)
[10]   Compositionally-tuned epitaxial cubic MgxZn1-xO on Si(100) for deep ultraviolet photodetectors [J].
Yang, W ;
Hullavarad, SS ;
Nagaraj, B ;
Takeuchi, I ;
Sharma, RP ;
Venkatesan, T ;
Vispute, RD ;
Shen, H .
APPLIED PHYSICS LETTERS, 2003, 82 (20) :3424-3426