共 23 条
[3]
Heteroepitaxial growth of 3C-SiC using HMDS by atmospheric CVD
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
1999, 61-2
:579-582
[6]
HUANG XMH, 2003, P SOL STAT SENS ACT, P368
[9]
Heteroepitaxial growth of 3C-SiC on SOI for sensor applications
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
1999, 61-2
:516-521
[10]
KROTZ G, 1998, SPRING P ADV MICR AU, P223