Micropatterning of Ni particles on a BaTiO3 green sheet using a self-assembled monolayer

被引:23
作者
Masuda, Y [1 ]
Koumura, T
Okawa, T
Koumoto, K
机构
[1] Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Nagoya, Aichi 4648603, Japan
[2] Daiken Chem Co Ltd, Osaka 5360011, Japan
关键词
BaTiO3 green sheet; Ni particle; site-selective deposition; internal electrode; surface modification; self-assembled monolayer; multilayer ceramic capacitor;
D O I
10.1016/S0021-9797(03)00217-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We studied surface modification of ceramic BaTiO3 green sheets including polyvinylbutyral (PVB) as an organic binder and successfully fabricated a patterned self-assembled monolayer (SAM) which has a region of amino groups and a region of silanol groups on the green sheet. The patterned SAM was then immersed in water containing Ni particles that show negative zeta potential in water. Ni particles were attracted to the amino groups of the patterned SAM that show positive zeta potential by attractive electrostatic interaction. Consequently, a micropattern of Ni particles was achieved using a SAM at room temperature in water. This process can be used to fabricate a thin uniform internal Ni electrode for miniaturized high-performance multilayer ceramic capacitors (MLCC). (C) 2003 Elsevier Science (USA). All rights reserved.
引用
收藏
页码:190 / 195
页数:6
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