Improvement of the reliability of amorphous silicon transistors by conduction-band tail width reduction

被引:3
作者
GadelRab, SM [1 ]
Chamberlain, SG [1 ]
机构
[1] Univ Waterloo, Dept Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
amorphous silicon; amorphous silicon stability; a-Si : H transistor reliability; energy band tails; thin-film transistors;
D O I
10.1109/16.725252
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present theoretical and experimental evidence showing that bias induced threshold voltage degradation of a-Si:H transistors is reduced by decreasing the width of the conduction-hand tail. We show that transistors which are made using a thick (0.5 mu m) a-Si:H layer possess a narrower conduction-hand tail compared to transistors made using thin (0.05 mu m) a-Si:H layers. We find that bias-induced threshold voltage degradation decreases by a factor of two for thick-layered TFT's compared with conventional, thin-layered TFT's, Finally, we present device design guidelines for improving the reliability of a-Si:EI TFT's including several possible device designs for achieving further improvements in the reliability of a-Si:H TFT's.
引用
收藏
页码:2179 / 2186
页数:8
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