Functionalized individual ZnO microwire for natural gas detection

被引：68

作者：

Chai, G. Y. ^{[1
]}

Lupan, O. ^{[1
,2
]}

Rusu, E. V. ^{[3
]}

Stratan, G. I. ^{[3
]}

Ursaki, V. V. ^{[4
,5
]}

Sontea, V. ^{[2
]}

Khallaf, H. ^{[1
]}

Chow, L. ^{[1
,6
,7
,8
,9
]}

机构：

[1] Univ Cent Florida, Dept Phys, Orlando, FL 32816 USA

[2] Tech Univ Moldova, Dept Microelect & Semicond Devices, MD-2004 Kishinev, Moldova

[3] Moldavian Acad Sci, Lab Nanotechnol, Inst Elect Engn & Nanotechnol, MD-2028 Kishinev, Moldova

[4] Moldavian Acad Sci, Inst Appl Phys, MD-2028 Kishinev, Moldova

[5] Tech Univ Moldova, Natl Ctr Mat Study & Testing, MD-2004 Kishinev, Moldova

[6] Chang Gung Univ, Grad Inst Electroopt Engn, Guishan, Taiwan

[7] Chang Gung Univ, Green Technol Res Ctr, Guishan, Taiwan

[8] Univ Cent Florida, Adv Mat Proc & Anal Ctr, Orlando, FL 32816 USA

[9] Univ Cent Florida, Dept Mech Mat & Aerosp, Orlando, FL 32816 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2012年 / 176卷

关键词：

ZnO microwire; Sensor; Natural gas; Methane; Focused ion beam; LOW-POWER CONSUMPTION; SENSOR; FABRICATION; NANOSENSOR; NANOWIRE; METHANE; BUTANE; TIO2; SNO2; CH4;

D O I：

10.1016/j.sna.2012.01.012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A single ZnO microwire detector for the monitoring of natural gas species is described. Single-crystal ZnO microwires were synthesized using a carbothermal reduction vapor phase transport method. It was characterized by XRD, EDX, SEM. Raman and photoluminescence techniques. The sensor structure was fabricated by in situ lift-out method using focused ion beam (FIB) system. The prototype is then functionalized with palladium and used as sensing element. The main advantage of the FIB procedure is a quick verification/testing of concept and is compatible with micro/nanoelectronic devices. A response of 5% was obtained for a single ZnO microwire sensor at 2000 ppm natural gas in the air at room temperature. At 400 degrees C the response increases to 40%. Selectivity to different gasses was investigated and higher response was detected for natural gas. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：64 / 71

页数：8

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