Fabrication of cadmium oxide thin films using the Langmuir-Blodgett deposition technique

被引:47
作者
Matsuura, N
Johnson, DJ
Amm, DT
机构
[1] YORK UNIV,DEPT PHYS & ASTRON,N YORK,ON M3J 1P3,CANADA
[2] QUEENS UNIV,DEPT PHYS,KINGSTON,ON K7L 3N6,CANADA
基金
加拿大自然科学与工程研究理事会;
关键词
cadmium; Langmuir-Blodgett films; oxides; resistivity;
D O I
10.1016/S0040-6090(96)09283-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin conducting cadmium oxide (CdO) films were fabricated from Langmuir-Blodgett Cd arachidate precursors through a combination of low temperature ultra-violet/ozone (UVO) decomposition and annealing treatments. The decomposition and oxidation of the UVO residue to CdO occurred between 220 to 300 degrees C, and was observed using in-situ laser reflectivity and resistivity measurements. The final CdO film resistivities were in the 10(4)-10(5) Omega/square range, depending on annealing conditions. Atomic force microscopy revealed nanometre-scale surface roughness in the final film, which most likely resulted in the lower conductivity measured in the film as compared to bulk CdO fabrication techniques. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:260 / 265
页数:6
相关论文
共 24 条
[1]   DECOMPOSITION OF LANGMUIR-BLODGETT-FILMS TO FORM METAL-OXIDE LAYERS [J].
AMM, DT ;
JOHNSON, DJ ;
MATSUURA, N ;
LAURSEN, T ;
PALMER, G .
THIN SOLID FILMS, 1994, 242 (1-2) :74-77
[2]   FABRICATION OF ULTRATHIN METAL-OXIDE FILMS USING LANGMUIR-BLODGETT DEPOSITION [J].
AMM, DT ;
JOHNSON, DJ ;
LAURSEN, T ;
GUPTA, SK .
APPLIED PHYSICS LETTERS, 1992, 61 (05) :522-524
[3]   PREPARATION OF ULTRATHIN FERRIC-OXIDE LAYERS USING LANGMUIR-BLODGETT-FILMS [J].
BRANDL, D ;
SCHOPPMANN, C ;
TOMASCHKO, C ;
MARKL, J ;
VOIT, H .
THIN SOLID FILMS, 1994, 249 (01) :113-117
[4]   PREPARATION OF ULTRATHIN METAL-OXIDE LAYERS BY MEANS OF LANGMUIR-BLODGETT-FILMS [J].
BRANDL, D ;
SCHOPPMANN, C ;
TOMASCHKO, C ;
MARKL, J ;
VOIT, H .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 58 (06) :557-562
[5]   DEGENERATE CADMIUM-OXIDE FILMS FOR ELECTRONIC DEVICES [J].
CHU, TL ;
CHU, SS .
JOURNAL OF ELECTRONIC MATERIALS, 1990, 19 (09) :1003-1005
[6]   THERMAL-DECOMPOSITION OF OXALATES .16. THERMAL-DECOMPOSITION STUDIES ON CADMIUM OXALATE [J].
FATEMI, NS ;
DOLLIMORE, D ;
HEAL, GR .
THERMOCHIMICA ACTA, 1982, 54 (1-2) :167-180
[7]   TREATMENT OF CDO AT ROOM-TEMPERATURE AND 150-DEGREES-C IN A WATER-VAPOR-SATURATED ATMOSPHERE .1. [J].
GONIELIZALDE, S ;
FRESNORUIZ, S ;
GARCIACLAVEL, E .
THERMOCHIMICA ACTA, 1989, 142 (01) :73-82
[8]   A MODULAR MULTIFUNCTIONAL LANGMUIR-BLODGETT TROUGH [J].
GRUNFELD, F .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (02) :548-555
[9]   ORDER-DISORDER TRANSITIONS OF YTTRIUM ARACHIDATE LANGMUIR-BLODGETT-FILMS VIA ELLIPSOMETRIC ANISOTROPIES [J].
JOHNSON, DJ ;
AMM, DT .
THIN SOLID FILMS, 1994, 247 (01) :120-128
[10]  
JOHNSON DJ, 1994, THESIS QUEENS U KING