PREPARATION OF ULTRATHIN METAL-OXIDE LAYERS BY MEANS OF LANGMUIR-BLODGETT-FILMS

被引:5
作者
BRANDL, D
SCHOPPMANN, C
TOMASCHKO, C
MARKL, J
VOIT, H
机构
[1] Physikalisches Institut der Universität Erlangen-Nürnberg, Erlangen
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1994年 / 58卷 / 06期
关键词
D O I
10.1007/BF00348166
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Langmuir-Blodgett (LB) films of fatty acid salts (Y-stearate, Y-arachidate, Cu-arachidate, Ba-stearate) were thermally oxidized. As a result one obtains ultrathin (a few angstrom thick) metal-oxide films at the substrate. The surface of the metal-oxide films was found to be rather inhomogeneous. Y and Cu ions remain quantitatively at the substrate despite the heating procedure. A linear dependence between area density of the metal ions in the oxidized films and the number of monolayers of the LB films was observed. The preparation of a mixed metal-oxide film containing Y, Ba, Cu with a given stoichiometry was found to be difficult due to the effect of counter ion exchange. The samples were investigated by means of plasma-desorption and spontaneous-desorption mass spectrometry, by Rutherford back-scattering and electron microscopy.
引用
收藏
页码:557 / 562
页数:6
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