STUDY OF THERMALLY OXIDIZED YTTRIUM FILMS ON SILICON

[1] ASPNES DE, UNPUB

[2] THE OPTICAL-PROPERTIES OF EVAPORATED Y2O3 FILMS [J]. THIN SOLID FILMS, 1986, 139 (02) : 121 - 132

[3] GOLDSTEIN RM, 1968, 18TH P EL C IEEE NEW, P141

[4] GURVITCH M, 1984, ADV CRYOGEN ENG, V30, P509

[5] HUGGINS HA, 1983, J VAC SCI TECHNOL A, V1, P77, DOI 10.1116/1.572314

[6] MANCHANDA L, UNPUB

[7] OXIDATION TEMPERATURE-DEPENDENCE OF THE DC ELECTRICAL-CONDUCTION CHARACTERISTICS AND DIELECTRIC STRENGTH OF THIN TA2O5 FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) : 1587 - 1595

[8] ELECTRICAL-PROPERTIES OF AMORPHOUS TANTALUM PENTOXIDE THIN-FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) : 6502 - 6508

[9] SOME PROPERTIES OF CRYSTALLIZED TANTALUM PENTOXIDE THIN-FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) : 3715 - 3725

[10] Reed T. B., 1971, FREE ENERGY FORMATIO

[1] ASPNES DE, UNPUB

[2] THE OPTICAL-PROPERTIES OF EVAPORATED Y2O3 FILMS [J]. THIN SOLID FILMS, 1986, 139 (02) : 121 - 132

[3] GOLDSTEIN RM, 1968, 18TH P EL C IEEE NEW, P141

[4] GURVITCH M, 1984, ADV CRYOGEN ENG, V30, P509

[5] HUGGINS HA, 1983, J VAC SCI TECHNOL A, V1, P77, DOI 10.1116/1.572314

[6] MANCHANDA L, UNPUB

[7] OXIDATION TEMPERATURE-DEPENDENCE OF THE DC ELECTRICAL-CONDUCTION CHARACTERISTICS AND DIELECTRIC STRENGTH OF THIN TA2O5 FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1986, 59 (05) : 1587 - 1595

[8] ELECTRICAL-PROPERTIES OF AMORPHOUS TANTALUM PENTOXIDE THIN-FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (11) : 6502 - 6508

[9] SOME PROPERTIES OF CRYSTALLIZED TANTALUM PENTOXIDE THIN-FILMS ON SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) : 3715 - 3725

[10] Reed T. B., 1971, FREE ENERGY FORMATIO