SU-8 cantilever sensor system with integrated readout

被引：68

作者：

Johansson, A ^{[1
]}

Calleja, M ^{[1
]}

Rasmussen, PA ^{[1
]}

Boisen, A ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Micro & Nanotechnol MIC, DK-2800 Lyngby, Denmark

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2005年 / 123-24卷

关键词：

cantilever; piezoresistive readout; SU-8; biosensor; electroplating;

D O I：

10.1016/j.sna.2005.03.025

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a cantilever sensor array with integrated piezoresistive readout. The cantilevers are placed in a micro channel and the chip is fabricated in the epoxy-based photoresist SU-8. Surface stress changes on the cantilever due to molecular adsorption are detected by encapsulated Au piezoresistors. High sensitivity can be obtained due to the low Young's modulus of SU-8 and the piezoresistive readout will make the sensor compact to enable a portable device. This article describes the fabrication and characterisation of the cantilever sensor as well as some preliminary measurements using alkanethiols. (C) 2005 Elsevier B.V. All rights reserved.

引用

页码：111 / 115

页数：5

共 14 条

[1] Development of nanomechanical biosensors for detection of the pesticide DDT [J].

Alvarez, M ;

Calle, A ;

Tamayo, J ;

Lechuga, LM ;

Abad, A ;

Montoya, A .

BIOSENSORS & BIOELECTRONICS, 2003, 18 (5-6) :649-653

[2] Label-free protein assay based on a nanomechanical cantilever array [J].

Arntz, Y ;

Seelig, JD ;

Lang, HP ;

Zhang, J ;

Hunziker, P ;

Ramseyer, JP ;

Meyer, E ;

Hegner, M ;

Gerber, C .

NANOTECHNOLOGY, 2003, 14 (01) :86-90

[3]

CALLEJA M, 2003, SPIE INT S MICR NEW

[4] Translating biomolecular recognition into nanomechanics [J].

Fritz, J ;

Baller, MK ;

Lang, HP ;

Rothuizen, H ;

Vettiger, P ;

Meyer, E ;

Güntherodt, HJ ;

Gerber, C ;

Gimzewski, JK .

SCIENCE, 2000, 288 (5464) :316-318

[5]

GAMMELGAARD L, IN PRESS APPL PHYS L

[6]

Hansen A.G., 2001, PROBE MICROSCO, V2, P139

[7] Cantilever transducers as a platform for chemical and biological sensors [J].

Lavrik, NV ;

Sepaniak, MJ ;

Datskos, PG .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (07) :2229-2253

[8] Investigation of the bond strength between the photo-sensitive polymer SU-8 and gold [J].

Nordström, M ;

Johansson, A ;

Noguerón, ES ;

Clausen, B ;

Calleja, M ;

Boisen, A .

MICROELECTRONIC ENGINEERING, 2005, 78-79 :152-157

[9] Desorption characteristics, of uncoated silicon microcantilever surfaces for explosive and common nonexplosive vapors [J].

Pinnaduwage, LA ;

Thundat, T ;

Gehl, A ;

Wilson, SD ;

Hedden, DL ;

Lareau, RT .

ULTRAMICROSCOPY, 2004, 100 (3-4) :211-216

[10] Optimised cantilever biosensor with piezoresistive read-out [J].

Rasmussen, PA ;

Thaysen, J ;

Hansen, O ;

Eriksen, SC ;

Boisen, A .

ULTRAMICROSCOPY, 2003, 97 (1-4) :371-376

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