Influence of fabrication errors on Wolter mirror imaging performance

被引：14

作者：

Sugisaki, K

Takahashi, S

Yoshidomi, Y

Shinada, K

Mitomi, O

Uchishiba, E

Hamada, R

Kato, T

Aoki, S

机构：

[1] Nikon Corp, Tsukuba Res Lab, Ibaraki, Osaka 3002635, Japan

[2] Nikon Corp, Sagamihara R&D Dept, Kanagawa 2280828, Japan

[3] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3050006, Japan

来源：

APPLIED OPTICS | 1998年 / 37卷 / 34期

关键词：

D O I：

10.1364/AO.37.008057

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The resolution of the Wolter mirror, which is utilized as an objective in soft-x-ray microscopes, is limited by fabrication errors. We studied the relation between fabrication errors and imaging performance of the Wolter mirror to determine how this performance could be improved. Figure errors, which are characterized by low spatial frequency, were analyzed by ray tracing, and surface roughness, characterized by high spatial frequency, was analyzed by modified ray tracing. Modified ray tracing was based on ray tracing but took scattering into account. The results of these analyses were compared with experimental data. As a result, we obtained a simple and practical fabricating tolerance criterion that may be employed to obtain higher Wolter mirror resolution. Additionally, we discuss problems in current Wolter mirror fabrication techniques and the changes that might be made in both the design and the fabrication process to improve imaging performance. (C) 1998 Optical Society of America.

引用

页码：8057 / 8066

页数：10

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