Single- and multi-pulse formation of surface structures under static femtosecond irradiation

被引:61
作者
Guillermin, M.
Garrelie, F.
Sanner, N.
Audouard, E.
Soder, H.
机构
[1] CNRS, UMR 5516, LTSI, F-42000 St Etienne, France
[2] Impuls SAS, F-42000 St Etienne, France
关键词
ripples; morphology; laser; LASER-ABLATION; DAMAGE; NANOSTRUCTURES; MORPHOLOGY; SI;
D O I
10.1016/j.apsusc.2007.02.093
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Femtosecond surface structure modifications are investigated under irradiation with laser pulses of 150 fs at 800 nm, on copper and silicon. We report sub-wavelength periodic structures formation (ripples) with a periodicity of 500 nm for both materials. These ripples are perpendicular to the laser polarization and can be obtained with only one pulse. The formation of these ripples corresponds to a fluence threshold of 1 J/cm(2) for copper and 0.15 J/cm(2) for silicon. We find several morphologies when more pulses are applied: larger ripples parallel to the polarization are formed with a periodicity of 1 mu m and degenerate into a worm-like morphology with a higher number of pulses. In addition, walls of deep holes also show subwavelength and large ripples. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:8075 / 8079
页数:5
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