Nonequilibrium and effect of gas mixtures in an atmospheric microplasma

被引：85

作者：

Mariotti, Davide ^{[1
,2
]}

机构：

[1] Rochester Inst Technol, Dept Microelect Engn, Rochester, NY 14623 USA

[2] Natl Inst Ind Sci & Technol AIST, Tsukuba, Ibaraki 3058568, Japan

来源：

APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 15期

关键词：

D O I：

10.1063/1.2912039

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The gas and effective electron temperatures have been estimated for atmospheric microplasma by means of optical emission spectroscopy. The results have shown that the microplasma exhibits nonequilibrium and, as its size is reduced, the two temperatures depart from each other, enhancing the nonequilibrium characteristic. The effect of methane and oxygen concentrations has also been studied, showing that gas mixtures have an important effect on the microplasma state. (C) 2008 American Institute of Physics.

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页数：3

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