Molecular precursors for the CVD of niobium and tantalum nitride

被引：21

作者：

Bleau, JE

Carmalt, CJ

O'Neill, SA

Parkin, IP

White, AJP

Williams, DJ

机构：

[1] UCL, Christopher Ingold Labs, Dept Chem, London WC1H 0AJ, England

[2] Univ London Imperial Coll Sci Technol & Med, Dept Chem, London SW7 2AZ, England

来源：

POLYHEDRON | 2005年 / 24卷 / 03期

关键词：

tantalum nitride; niobium nitride; CVD;

D O I：

10.1016/j.poly.2004.12.006

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Treatment of NbCl(5) with excess HN(SiMe(2)Ph)2 in toluene resulted in the formation of crystalline [NbCl(3)(NSiMe(2)Ph)(NH(2)SiMe(2)Ph)](2), In the presence of excess 3,5-lutidine (3,5-Me(2)C(5)H(3)N), the reaction of TaCl(5) with 2 equivalents of HN(SiMe(3))(2) resulted in the isolation of the monomeric complex [TaCl(3)(NSiMe(3))(NC(5)H(3)Me(2)-3,5)(2)]. The X-ray crystal structure of [TaCl(3)(NSiMe(3))(NC(5)H(3)Me(2)-3,5)(2)] has been determined. Low pressure chemical vapour deposition of [NbCl(3)(NSiMe(2)Ph)(NH(2)SiMe(2)Ph)](2) and [TaCl(3)(NSiMe(3))(NC(5)H(3)Me(2-)3,5)(2)] forms thin films of niobium and tantalum nitride, respectively, at 600degreesC. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：463 / 468

页数：6

共 29 条

[1] PREPARATION OF NIOBIUM AND TANTALUM ORGANOIMIDO COMPLEXES FROM REACTIONS OF THE PENTAHALIDES WITH AMINES - THE CRYSTAL AND MOLECULAR-STRUCTURE OF BIS(TERT-BUTYLAMINE)BIS(TERT-BUTYLIMIDO)BIS(MU-ETHOXY)TETRACHLORODITANTALUM [J].