Field emission from heat-treated cobalt-containing amorphous carbon composite films on glass substrate

被引:2
作者
Li, YJ [1 ]
Tau, SP [1 ]
Tay, BK [1 ]
Sun, Z [1 ]
Chen, GY [1 ]
Chen, JS [1 ]
Ding, XZ [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2001年 / 19卷 / 03期
关键词
D O I
10.1116/1.1372918
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Cobalt-containing amorphous carbon composite films have been prepared by filtered cathodic vacuum are technique (FCVA) with a cobalt-containing graphite target on nickel-coated Coming glass at room temperature. After heat treating at 550 degreesC in a mixture of acetylene and nitrogen gases, field emission-properties of the a-C:Co films were significantly improved. Relatively uniform emission sites and a low threshold electric field of 2 V/mum were obtained without conditioning. The relatively low threshold held is probably attributed to both the graphitization of the composite films caused by cobalt catalyst and modified surface conditions by the heat-treatment process. Moreover, the heat-treated samples still remained a smooth surface with a root mean square roughness of about 22 nm, which could be possibly used to prepare gated carbon emitter array for field emission display. (C) 2001 American Vacuum Society.
引用
收藏
页码:950 / 953
页数:4
相关论文
共 25 条
[1]  
Amaratunga GAJ, 1996, APPL PHYS LETT, V68, P2529, DOI 10.1063/1.116173
[2]   ENHANCED COLD-CATHODE EMISSION USING COMPOSITE RESIN CARBON COATINGS [J].
BAJIC, S ;
LATHAM, RV .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1988, 21 (01) :200-204
[3]   RAMAN ANALYSIS OF LASER-ANNEALED AMORPHOUS-CARBON FILMS [J].
BOWDEN, M ;
GARDINER, DJ ;
SOUTHALL, JM .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (01) :521-523
[4]   Field emission from nitrogen doped tetrahedral amorphous carbon prepared by filtered cathodic vacuum are technique [J].
Cheah, LK ;
Shi, X ;
Tay, BK ;
Sun, Z .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (04) :2049-2051
[5]   Field emission from aligned high-density graphitic nanofibers [J].
Chen, Y ;
Patel, S ;
Ye, YG ;
Shaw, ST ;
Luo, LP .
APPLIED PHYSICS LETTERS, 1998, 73 (15) :2119-2121
[6]   Fully sealed, high-brightness carbon-nanotube field-emission display [J].
Choi, WB ;
Chung, DS ;
Kang, JH ;
Kim, HY ;
Jin, YW ;
Han, IT ;
Lee, YH ;
Jung, JE ;
Lee, NS ;
Park, GS ;
Kim, JM .
APPLIED PHYSICS LETTERS, 1999, 75 (20) :3129-3131
[7]   The role of dc current limitations in Fowler-Nordheim electron emission from carbon films [J].
Cui, JB ;
Teo, KBK ;
Tsai, JTH ;
Robertson, J ;
Milne, WI .
APPLIED PHYSICS LETTERS, 2000, 77 (12) :1831-1833
[8]   Field emitters based on porous aluminum oxide templates [J].
Davydov, DN ;
Sattari, PA ;
AlMawlawi, D ;
Osika, A ;
Haslett, TL ;
Moskovits, M .
JOURNAL OF APPLIED PHYSICS, 1999, 86 (07) :3983-3987
[9]  
Groning O, 1996, APPL PHYS LETT, V69, P476, DOI 10.1063/1.118145
[10]   Field emission from tetrahedral amorphous carbon as a function of surface treatment and substrate material [J].
Hart, A ;
Satyanarayana, BS ;
Milne, WI ;
Robertson, J .
APPLIED PHYSICS LETTERS, 1999, 74 (11) :1594-1596