Exchanges between group-III (B, Al, Ga, In) and Si atoms on Si(111)-root 3x root 3 surfaces

被引:15
作者
Hibino, H
Ogino, T
机构
[1] Nippon Telegraph and Telephone (NTT) Basic Research Laboratories
来源
PHYSICAL REVIEW B | 1996年 / 54卷 / 08期
关键词
D O I
10.1103/PhysRevB.54.5763
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High-temperature scanning tunneling microscopy (HT-STM) observation of exchanges between group-III and Si atoms on Si(111)-root 3X root 3 surfaces is reported. The exchange rates are obtained from the HT-STM images as a function of the temperature. The activation energies of the exchange are 1.4, 1.7, and 1.4 eV for Al, Ga, and In adatoms, respectively. The prefactors are within the range 10(10)-10(13) s(-1). These prefactors are close to that for the exchange between Pb and Si adatoms on a Si(111)-root 3X root 3 surface and much larger than that for the exchange between Pb and Ge adatoms on a Ge(111)-c(2X8) surface. The adatom exchange mechanisms on Si(111)-root 3X root 3 and Ge(111)-c(2 X 8) are different. We also investigated exchanges between B and Si atoms in the second layer of the Si(111)-root 3X root 3 surface. The obtained activation energy and prefactor are 3.5 eV and 1X10(18) s(-1) and the activation energy is close to that of B diffusion in bulk Si.
引用
收藏
页码:5763 / 5768
页数:6
相关论文
共 36 条
[1]   ISOTHERMAL DESORPTION OF INDIUM FROM SQUARE-ROOT-31-IN AND SQUARE-ROOT-3-IN ON SILICON (111) SURFACES [J].
BABA, S ;
KAWAJI, M ;
KINBARA, A .
SURFACE SCIENCE, 1979, 85 (01) :29-36
[2]   SURFACE DOPING AND STABILIZATION OF SI(111) WITH BORON [J].
BEDROSSIAN, P ;
MEADE, RD ;
MORTENSEN, K ;
CHEN, DM ;
GOLOVCHENKO, JA ;
VANDERBILT, D .
PHYSICAL REVIEW LETTERS, 1989, 63 (12) :1257-1260
[3]  
BEDROSSIAN P, 1991, NUCL INSTRUM METH B, V48, P296
[4]   DISPLACEMENT DISTRIBUTION AND ATOMIC JUMP DIRECTION IN DIFFUSION OF IR ATOMS ON THE IR(001) SURFACE [J].
CHEN, CL ;
TSONG, TT .
PHYSICAL REVIEW LETTERS, 1990, 64 (26) :3147-3150
[5]   POINT-DEFECTS AND DOPANT DIFFUSION IN SILICON [J].
FAHEY, PM ;
GRIFFIN, PB ;
PLUMMER, JD .
REVIEWS OF MODERN PHYSICS, 1989, 61 (02) :289-384
[6]   DIFFUSION PATH FOR AN AL ADATOM ON AL(001) [J].
FEIBELMAN, PJ .
PHYSICAL REVIEW LETTERS, 1990, 65 (06) :729-732
[7]   DIFFUSION OF DONOR AND ACCEPTOR ELEMENTS IN SILICON [J].
FULLER, CS ;
DITZENBERGER, JA .
JOURNAL OF APPLIED PHYSICS, 1956, 27 (05) :544-553
[8]   DIRECT MEASUREMENT OF DIFFUSION BY HOT TUNNELING MICROSCOPY - ACTIVATION-ENERGY, ANISOTROPY, AND LONG JUMPS [J].
GANZ, E ;
THEISS, SK ;
HWANG, IS ;
GOLOVCHENKO, J .
PHYSICAL REVIEW LETTERS, 1992, 68 (10) :1567-1570
[9]   SUBMONOLAYER PHASES OF PB ON SI(111) [J].
GANZ, E ;
XIONG, FL ;
HWANG, IS ;
GOLOVCHENKO, J .
PHYSICAL REVIEW B, 1991, 43 (09) :7316-7319
[10]   ELECTRONIC-STRUCTURE OF LOCALIZED SI DANGLING-BOND DEFECTS BY TUNNELING SPECTROSCOPY [J].
HAMERS, RJ ;
DEMUTH, JE .
PHYSICAL REVIEW LETTERS, 1988, 60 (24) :2527-2530